A 3-Dof Mems Motion Stage for Scanning Tunneling Microscopy
Author:
Affiliation:
1. National Institute of Standards and Technology,USA
Funder
U.S. Department of Energy
Office of Energy Efficiency and Renewable Energy
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699453.pdf?arnumber=9699453
Reference9 articles.
1. Atomic-precision advanced manufacturing for Si quantum computing
2. A single-atom transistor
3. Integrated micro‐scanning tunneling microscope
4. Microfabricated scanning tunneling microscope
5. A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy
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