A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy-Reference-Cited by-同舟云学术

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A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy

Published:2021-04 Issue:2 Volume:30 Page:271-280
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Alipour Afshin,Coskun M. Bulut,Moheimani S. O. Reza

Funder

U.S. Department of Energy’s Office of Energy Efficiency and Renewable Energy (EERE) through the Advanced Manufacturing Office

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://ieeexplore.ieee.org/ielam/84/9395268/9336220-aam.pdf

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Kalman Filter-Based Estimation of Surface Conductivity and Surface Variations in Scanning Tunneling Microscopy;IEEE Transactions on Control Systems Technology;2024-07

2. Atom-resolved imaging with a silicon tip integrated into an on-chip scanning tunneling microscope;Review of Scientific Instruments;2024-03-01

3. Accrute Measurement of Two-Dimensional Grid Based on Micro-Vision;2023 5th International Conference on Intelligent Control, Measurement and Signal Processing (ICMSP);2023-05-19

4. Design and Control of a Novel 3-D Piezoelectric Scanning Coaxial Optical Microscope System;IEEE Transactions on Instrumentation and Measurement;2023

5. Atomic-resolution lithography with an on-chip scanning tunneling microscope;Journal of Vacuum Science & Technology B;2022-04-25

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