Author:
Mukherjee T.,Fedder G.K.,Blanton R.D.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Software,Electrical and Electronic Engineering,Hardware and Architecture,Software
Cited by
29 articles.
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1. MEMS Design;Microsystems and Nanotechnology;2012
2. Nonlinear Modeling of Squeeze-Film Phenomena;Nonlinear Approaches in Engineering Applications;2011-12-01
3. A novel technique for stress gradient measurement of electrostatic MEM switches and non ideal anchor’s effects;Analog Integrated Circuits and Signal Processing;2009-06-14
4. Next generation of TCAD environments for MEMS design;2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS;2008-04
5. TCAD tool for innovative MEMS and MOEMS: an all-in-one solution;Micromachining and Microfabrication Process Technology XIII;2008-02-07