Author:
Triltsch U.,Buttgenbach S.
Cited by
4 articles.
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1. Modeling of Silicon Etching;Handbook of Silicon Based MEMS Materials and Technologies;2015
2. Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids;Microsystem Technologies;2011-12-24
3. Manufacture and Processing of MEMS Structures;Handbook of Silicon Based MEMS Materials and Technologies;2010
4. Modeling of silicon etching;Handbook of Silicon Based MEMS Materials and Technologies;2010