Modeling of silicon etching

Author:

Gosálvez Miguel A.

Publisher

Elsevier

Reference60 articles.

1. OYSTER, a three-dimensional structural simulator for microelectromechanical design;Koppelman;Sens. Actuators,1989

2. F. Maseeh, R.M. Harris, S.D. Senturia, A CAD architecture for microelectromechanical systems, in: Proceedings IEEE Micro Electro Mechanical Systems Workshop, Napa Valley, CA, February 1990, pp. 44–49.

3. R.M. Harris, F. Maseeh, S.D. Senturia, Automatic generation of a 3-D solid model of a microfabricated structure, in: Proceedings IEEE Solid-State Sensor and Actuator Workshop, June 1990, pp. 36–41.

4. A computer-aided design system for microelectromechanical systems (MEMCAD);Senturia;J. Microelectromech. Syst.,1992

5. Y. He, J. Marchetti, F. Maseeh, MEMS computer-aided design, in: Proceedings European Design & Test Conference and Exhibition on Microfabrication, Paris, France, March 17–20, 1997.

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