Effect of Metallization on Fused Silica Dual-Shell Gyroscopes
Author:
Affiliation:
1. University of California,MicroSystems Laboratory,Department of Mechanical and Aerospace Engineering,Irvine,CA,USA,92697
Funder
Defense Advanced Research Projects Agency
National Institute of Standards and Technology
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9787684/9787697/09787525.pdf?arnumber=9787525
Reference11 articles.
1. Electrical resistivity of gold thin film as a function of film thickness
2. Effect of metal annealing on the Q-factor of metal- coated fused silica micro shell resonators
3. A Novel Capacitive Detection Scheme With Inherent Self-Calibration
4. Fused Quartz Dual-Shell Resonator Gyroscope
5. Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope
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1. Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope;Sensors;2023-03-08
2. Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes;Journal of Microelectromechanical Systems;2022-12
3. Uniform Sputtered Metallic Coatings on Silica Glass Micro Shell Resonators;2022 23rd International Conference on Electronic Packaging Technology (ICEPT);2022-08-10
4. Effect of Geometry on Energy Losses In Fused Silica Dual-Shell Gyroscopes;2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2022-05-08
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