Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k<sup>2</sup> of 5.1% at 50.74 GHz-Reference-Cited by-同舟云学术

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Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k² of 5.1% at 50.74 GHz

Published:2023-05-15 Issue: Volume: Page:
ISSN:
Container-title:2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
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Author:

Kramer Jack¹,Chulukhadze Vakhtang¹,Huynh Kenny²,Barrera Omar¹,Liao Michael²,Cho Sinwoo¹,Matto Lezli²,Goorsky Mark S.²,Lu Ruochen¹

Affiliation:

1. The University of Texas at Austin,Department of Electrical and Computer Engineering,Austin,US

2. University of California Los Angeles,Department of Electrical Engineering,Los Angeles,US

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10272029/10272034/10272149.pdf?arnumber=10272149

Reference27 articles.

1. High-frequency lamb wave device composed of MEMS structure using LiNbO3 thin film and air gap

2. 33 GHz Overmoded Bulk Acoustic Resonator

3. A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%

4. High-Frequency Lamb Wave Device Composed of LiNbO3 Thin Film;kadota;Jpn J Appl Phys,2009

5. 5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators

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1. A High Quality Factor, 19-GHz Periodically Poled AlScN BAW Resonator Fabricated in a Commercial XBAW Process;IEEE Transactions on Electron Devices;2024-09

2. A 19 GHz All-Epitaxial Al₀.₈Sc₀.₂N Cascaded FBAR for RF Filtering Applications;IEEE Electron Device Letters;2024-07

3. A 56 GHz Trilayer AlN/ScAlN/AlN Periodically Poled FBAR;2024 IEEE/MTT-S International Microwave Symposium - IMS 2024;2024-06-16

4. Experimental Study of Periodically Poled Piezoelectric Film Lithium Niobate Resonator at Cryogenic Temperatures;2024 IEEE/MTT-S International Microwave Symposium - IMS 2024;2024-06-16

5. A Fin-Mounted A5-Mode Lithium Niobate Resonator at 27.58 GHz with $k^{2}$ of 4.4%, $Q_{\mathrm{p}}$ of 448, and FoM of 19.7;2024 IEEE/MTT-S International Microwave Symposium - IMS 2024;2024-06-16

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