A 5.5 GHz S3 Mode Plate Acoustic Wave Resonator Using Lithium Tantalate Thin Film
Author:
Affiliation:
1. Fudan University,Key Laboratory for Information Science of Electromagnetic Waves (MoE),Shanghai,China
2. New Generation Semiconductor Materials Research Institute, Shandong University,Shandong,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10272029/10272034/10272068.pdf?arnumber=10272068
Reference12 articles.
1. A Ku-Band Oscillator Utilizing Overtone Lithium Niobate RF-MEMS Resonator for 5G
2. High-Q X Band Aluminum Nitride Combined Overtone Resonators
3. Crystal orientation dependence of piezoelectric properties in LiNbO3 and LiTaO3
4. Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators
5. Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection
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