Research on Novel Thermal Insulation Structure of CMOS-MEMS Thermopile
Author:
Affiliation:
1. National Changhua University of Education,Department of Mechatronics Engineering,Changhua,Taiwan, R.O.C
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9971143/9971472/09971595.pdf?arnumber=9971595
Reference4 articles.
1. Simultaneously controlling heat conduction and infrared absorption with a textured dielectric film to enhance the performance of thermopiles
2. A Front-Side Microfabricated Tiny-Size Thermopile Infrared Detector With High Sensitivity and Fast Response
3. High-Sensitivity Single Thermopile SOI CMOS MEMS Thermal Wall Shear Stress Sensor
4. A CMOS-MEMS Thermopile With Low Thermal Conductance and a Near-Perfect Emissivity in the 8–14-$\mu\hbox{m}$ Wavelength Range
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