High-Sensitivity Single Thermopile SOI CMOS MEMS Thermal Wall Shear Stress Sensor

Author:

De Luca Andrea,Haneef Ibraheem,Coull John D.,Ali Syed Zeeshan,Falco Claudio,Udrea Florin

Funder

European Union within the Seventh Framework Program through the SOI-HITS Project

Innovation in Science Pursuit for Inspired Research Project through the Higher Education Commission, Pakistan

British Council, U.K.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Calorimetric wall-shear-stress microsensors for low-speed aerodynamics;Experiments in Fluids;2024-04-12

2. Wall shear stress measurement of turbulent bubbly flows using laser Doppler displacement sensor;Flow Measurement and Instrumentation;2024-04

3. Surrogate-based parameter exploration for the design of MEMS calorimetric wall shear stress sensors by means of CFD;Sensors and Actuators A: Physical;2022-11

4. Research on Novel Thermal Insulation Structure of CMOS-MEMS Thermopile;2022 IET International Conference on Engineering Technologies and Applications (IET-ICETA);2022-10-14

5. A Bidirectional CMOS MEMS Thermal Wall Shear Stress Sensor with Improved Sensitivity and Low Power Consumption;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS);2021-01-25

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