Micro Coriolis Mass Flow Sensor Based on Electroplated Nickel Tubes
Author:
Affiliation:
1. Integrated Devices and Systems, MESA+ Institute for Nanotechnology, University of Twente,Enschede,The Netherlands
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9966996/9966997/09967259.pdf?arnumber=9967259
Reference10 articles.
1. Highly sensitive micro coriolis mass flow sensor
2. A differential pressure liquid flow sensor for flow regulation and dosing systems
3. μ-Coriolis mass flow sensor with improved flow sensitivity through modelling of the sensor
4. A Coriolis mass flow sensor structure in silicon
5. A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications
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