Design, Fabrication, and Test of 4H-SiC Accelerometer
Author:
Affiliation:
1. Xi'an Jiaotong University,State Key Laboratory for Manufacturing Systems Engineering,Xi'an,China,710049
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10324456/10324848/10324947.pdf?arnumber=10324947
Reference12 articles.
1. Simulation, fabrication and testing of bulk micromachined 6H-SiC high-g piezoresistive accelerometers
2. Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments
3. UV nanosecond laser machining and characterization for SiC MEMS sensor application
4. High-temperature tolerance of the piezoresistive effect in p-4H-SiC for harsh environment sensing
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