Affiliation:
1. Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan
Funder
Ministry of Science and Technology
Taiwan Semiconductor Research Institute (TSRI), Taiwan, for the capacitor and field-effect transistor (FETs) processing
Materials Analysis Technology Inc. (MA-tek), Taiwan, for material analysis
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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