A K-Band Bulk Acoustic Wave Resonator Using Periodically Poled Al<sub>0.72</sub>Sc<sub>0.28</sub>N-Reference-Cited by-同舟云学术

A K-Band Bulk Acoustic Wave Resonator Using Periodically Poled Al_0.72Sc_0.28N

Published:2023-07 Issue:7 Volume:44 Page:1196-1199
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Izhar ¹^ORCID,Fiagbenu Merrilyn M. A.¹^ORCID,Musavigharavi Pariasadat¹,Du Xingyu¹,Leathersich Jeff²,Moe Craig²^ORCID,Kochhar Abhay²,Stach Eric A.³^ORCID,Vetury Ramakrishna²,Olsson Roy H.¹^ORCID

Affiliation:

1. Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA

2. Akoustis Inc., Huntersville, NC, USA

3. Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA, USA

Funder

Defense Advanced Research Project Agency through the COmpact Front-end Filters at the ElEment-level (COFFEE) Program

Singh Center for Nanotechnology, which is funded under the NSF National Nanotechnology Coordinated Infrastructure Program

Department of Defense or the U.S. Government

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

https://ieeexplore.ieee.org/ielam/55/10168002/10141977-aam.pdf

Reference32 articles.

1. SAW and BAW technologies for RF filter applications: A review of the relative strengths and weaknesses

2. Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon

3. K-band ladder filters employing air-gap type thin film bulk acoustic resonators

4. Effect of size and shape on the performances of BAW resonators: A model and its applications

5. Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes

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