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Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays With On-Chip MOSFETs on Si

  • Published:2004-03 Issue:3 Volume:51 Page:415-420
  • ISSN:0018-9383
  • Container-title:IEEE Transactions on Electron Devices
  • language:en
  • Short-container-title:IEEE Trans. Electron Devices

Author:

Kawano T.,Kato Y.,Tani R.,Takao H.,Sawada K.,Ishida M.,Kawano T.,Kato Y.,Tani R.,Takao H.,Sawada K.,Ishida M.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

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