Repeatability study of an electrothermally actuated micromirror
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Publisher
IEEE
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http://xplorestaging.ieee.org/ielx5/5164157/5173200/05173309.pdf?arnumber=5173309
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A Photosensitive Polyimide-SiO2 Bimorph based Electrothermal Micromirror with High Impact Resistance;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams;Microsystems & Nanoengineering;2023-08-29
3. A Robust Lateral Shift Free (LSF) Electrothermal Micromirror With Flexible Multi-Morph Beams;2023-02-14
4. Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs;Micromachines;2019-10-12
5. Highly Reliable MEMS Temperature Sensors for 275 $^{ \circ}\hbox{C}$ Applications—Part 2: Creep and Cycling Performance;Journal of Microelectromechanical Systems;2013-02
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