Integrated Optical Pressure Sensors in Silicon-on-Insulator
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Link
http://xplorestaging.ieee.org/ielx5/4563994/6155673/06161682.pdf?arnumber=6161682
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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3. Micro-opto-mechanical pressure sensor via ring resonator-based Mach–Zehnder interferometer;The European Physical Journal Plus;2022-04
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5. Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor;Integrated Optics: Devices, Materials, and Technologies XXIV;2020-02-25
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