Analysis of SAW Sensor Coated by a Biocompatible Parylen Polymer-Reference-Cited by-同舟云学术

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Analysis of SAW Sensor Coated by a Biocompatible Parylen Polymer

Published:2023-05-28 Issue: Volume: Page:
ISSN:
Container-title:2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
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Author:

Smagin Nikolay¹,Duquennoy Marc¹,Vanotti Meddy²,Blondeau-Patissier Virginie²,Rousseau Lionel³,Valbin Laurie³,Herth Etienne⁴,Bouville David⁴

Affiliation:

1. IEMN - UMR 8520,Departement d’Opto-Acousto-Electronique,Valenciennes,France,F-59313

2. Université de Franche Comté,FEMTO-ST,Besançon Cedex,France

3. Cité Descartes,Esycom, Esiee Paris,Noisy le Grand Cedex,France,93162

4. Université Paris-Saclay,C2N,Palaiseau,France,91120

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10267916/10267866/10267938.pdf?arnumber=10267938

Reference22 articles.

1. Development of wireless, batteryfree gyroscope based on one-port SAW delay line and double resonant antenna

2. Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer

3. Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer;herth;Microsyst Technol,2017

4. New Optical Approach of SAW Delay Line Characterization

5. Fast time-domain laser Doppler vibrometry characterization of surface acoustic waves devices

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