Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer-Reference-Cited by-同舟云学术

Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer

Published:2015-10-15 Issue:1 Volume:213 Page:114-121
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Herth Etienne¹,Algré Emmanuelle²,Rauch Jean-Yves¹,Gerbedoen Jean-Claude³,Defrance Nicolas³,Delobelle Patrick¹

Affiliation:

1. Institut FEMTO-ST; Université de Franche-Comté; UBFC, CNRS UMR 6174-25044 Besançon cedex France

2. ESYCOM; ESIEE Paris; Cité Descartes, B.P. 99 93162 Noisy le Grand Cedex France

3. IEMN CNRS; UMR 8520 59650 Villeneuve d'Ascq France

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201532302/fullpdf

Reference45 articles.

1. Characterisation of aluminium nitride films and surface acoustic wave devices for microfluidic applications

2. A. Samarao F. Ayazi 2011 169 172

3. Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate

4. Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

5. Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators

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