A High-Precision and High-Bandwidth MEMS-Based Capacitive Accelerometer-Reference-Cited by-同舟云学术

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A High-Precision and High-Bandwidth MEMS-Based Capacitive Accelerometer

Published:2018-08-15 Issue:16 Volume:18 Page:6533-6539
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Utz Alexander¹^ORCID,Walk Christian²,Stanitzki Alexander¹,Mokhtari Mir³,Kraft Michael⁴,Kokozinski Rainer¹

Affiliation:

1. Department of Integrated Circuits and Systems, Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg, Germany

2. Department of Micro and Nanosystems, Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg, Germany

3. Mir Enterprises Ltd., London, U.K.

4. Department of Electrical Engineering, MICAS, KU Leuven, Leuven, Belgium

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/8418874/08392718.pdf?arnumber=8392718

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1. Analysis of a low frequency MEMS capacitive accelerometer under the effect of biasing voltage for detection of Parkinsons tremor;Microsystem Technologies;2024-08-08

2. A Tri-axial Resonating Beam MEMS Accelerometer;Journal of Electrical Engineering & Technology;2024-07-30

3. An Experimental Investigation of Noise Sources’ Contribution in the Multi-Chip Module Open-Loop Comb-Drive Capacitive MEMS Accelerometer;Electronics;2024-07-02

4. A piezoelectric vibration sensor with excellent performance based on Bi12SiO20 crystal for high-temperature applications;Applied Physics Letters;2024-07-01

5. Interferometric Fiber-Optic Accelerometer Based on a Hexagonal Beam;IEEE Sensors Journal;2024-05-15

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