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Rapid Prototyping of a Dammann Grating in DMD-Based Maskless Lithography

  • Published:2019-12 Issue:6 Volume:11 Page:1-10
  • ISSN:1943-0655
  • Container-title:IEEE Photonics Journal
  • language:
  • Short-container-title:IEEE Photonics J.

Author:

Zheng QiORCID,Zhou Jinyun,Chen Qiming,Lei Liang,Wen KunhuaORCID,Hu Yiming

Funder

National Natural Science Foundation of China

Science and Technology Research Projects of Guangdong Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics

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