Enhanced Absorption of a Patterned Thin Germanium Layer as a High-Contrast Grating

Author:

Zhang Yijin1ORCID,Cao Xiyuan2,Ding Yanyue1,Xue Zhongying1,Liu Xiaoyu1ORCID,Li Shifeng3,Sun Jian4,Jin Yi5,Wu Aimin1ORCID

Affiliation:

1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China

2. State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China

3. College of Engineering and Applied Science, Nanjing University, Nanjing, China

4. Engineering Research Center of Ultra-Precision Optical Manufacturing (Shanghai), Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai, China

5. Centre for Optical and Electromagnetic Research and International Research Center for Advanced Photonics, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Youth Innovation Promotion Association of the Chinese Academy of Sciences

Shanghai Sailing

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics

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