Author:
Qiu Meng,Zhuge Qunbi,Chagnon Mathieu,Zhang Fangyuan,Plant David V.
Funder
National Science Foundation (NSF)
NSF ERC Center for Extreme Ultraviolet Science and Technology
National Science Foundation
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Cited by
23 articles.
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