Reliability and electric properties for PECVD a-SiN/sub x/:H films with an optical band-gap ranging from 2.5 to 5.38 eV-Reference-Cited by-同舟云学术

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Reliability and electric properties for PECVD a-SiN/sub x/:H films with an optical band-gap ranging from 2.5 to 5.38 eV

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Container-title:2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual.
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Author:

van Delden M.H.W.M.,van der Wel P.J.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/8520/26927/01197760.pdf?arnumber=1197760

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