High-Pressure Sensor With High Sensitivity and High Accuracy for Full Ocean Depth Measurements
Author:
Affiliation:
1. Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
2. Kunshan Shuangqiao Sensor Measurement and Control Technology Company Ltd., Kunshan, China
Funder
Strategic Priority Research Program of the Chinese Academy of Sciences
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9722574/09684842.pdf?arnumber=9684842
Reference52 articles.
1. Oil-Filled Isolated High Pressure Sensor for High Temperature Application
2. High sensitive, linear and thermostable pressure sensor utilizing bipolar junction transistor for 5 kPa
3. Nonlinearity of the piezoresistance effect of p-type silicon diffused layers
4. Characteristic analysis of a pressure sensor using the silicon piezoresistance effect for high-pressure measurements
5. Performance analysis of a silicon piezoresistive pressure sensor based on diaphragm geometry and piezoresistor dimensions
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