Performance Study of MEMS Piezoresistive Pressure Sensors at Elevated Temperatures
Author:
Affiliation:
1. Electronics Division, Bhabha Atomic Research Centre, Mumbai, India
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9774386/09748161.pdf?arnumber=9748161
Reference34 articles.
1. Piezoresistance Effect in Germanium and Silicon
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3. Nanocrystalline diamond piezoresistive sensor
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