A Semi-Analytical and Computationally Efficient Method to Calculate the Touch-Point Pressure and Pull-In Voltage of a MEMS Pressure Sensor With a Circular Diaphragm-Reference-Cited by-同舟云学术

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A Semi-Analytical and Computationally Efficient Method to Calculate the Touch-Point Pressure and Pull-In Voltage of a MEMS Pressure Sensor With a Circular Diaphragm

Published:2021-01-15 Issue:2 Volume:21 Page:1332-1339
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Jindal Sumit Kumar^ORCID,Sethi Krish^ORCID,Patel Ishan^ORCID,Kumar Ajay^ORCID,Raghuwanshi Sanjeev Kumar^ORCID

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9298186/09175014.pdf?arnumber=9175014

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Theoretical analysis and comparative study of assorted diaphragm primarily based Micro Electro Mechanical System (MEMS) optical pressure sensors;Expert Systems with Applications;2024-07

2. A Digital Closed-Loop Control System for MEMS Resonant Pressure Sensors Based on a Quadrature Phase-Locked Loop;IEEE Sensors Journal;2024-04-01

3. Design and Numerical Simulation of Capacitive Pressure Sensor Based on Silicon Carbide;IEEE Sensors Journal;2023-12-15

4. Reliability Investigation of Bioinspired Hair Flow-Sensor;IEEE Sensors Journal;2021-10-15

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