Theoretical analysis and comparative study of assorted diaphragm primarily based Micro Electro Mechanical System (MEMS) optical pressure sensors-Reference-Cited by-同舟云学术

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Theoretical analysis and comparative study of assorted diaphragm primarily based Micro Electro Mechanical System (MEMS) optical pressure sensors

Published:2024-07 Issue: Volume:245 Page:122993
ISSN:0957-4174
Container-title:Expert Systems with Applications
language:en
Short-container-title:Expert Systems with Applications

Author:

Sripriya Thiagarajan^ORCID,Juliette Albert Anitha

Publisher

Elsevier BV

Subject

Artificial Intelligence,Computer Science Applications,General Engineering

Reference35 articles.

1. Modeling and analysis of all-optical pressure sensor using photonic crystal based micro ring resonator;Biswas;International Journal of Numerical Modelling: Electronic Networks, Devices and Fields,2022

2. Achieving uneven clustering in wireless sensor networks using fuzzy logic;Bohra;Materials Today: Proceedings,2022

3. Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications;Devi;Measurement: Sensors,2022

4. Low-pressure NEMS sensor design with slotted squared diaphragm structure;Devi;Materials Today: Proceedings,2023

5. Highly sensitive FBG pressure sensor based on square diaphragm;Fan;Optik,2021

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