Active Temperature Compensation for MEMS Capacitive Sensor
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9525468/09454159.pdf?arnumber=9454159
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Compensation of temperature effects in force-balanced microelectromechanical system accelerometers;Measurement;2024-09
2. Impact of Phase Noise on Bias Instability in Mode-Split Open-Loop MEMS Gyroscopes;IEEE Sensors Journal;2024-06-01
3. Nonlinear dynamics of three-layer microplates: simultaneous presence of the micro-scale and imperfect effects;The European Physical Journal Plus;2024-05-28
4. Failure analysis from microcracks to a dominant crack in MEMS thin films using combined damage and fracture mechanics;Engineering Failure Analysis;2023-10
5. Temperature Compensation of Wind Tunnel Balance Signal Detection System Based on IGWO-ELM;Sensors;2023-08-17
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