High Sensitivity MEMS Accelerometer Using PZT-Based Four L-Shaped Beam Structure
Author:
Affiliation:
1. Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan, China
2. Beijing Space Trek Technology Company Ltd., Beijing, China
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
Natural Science Foundation of Hebei Province
Hebei Province “333 Talent Project” Funded Project
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9757031/09723060.pdf?arnumber=9723060
Reference32 articles.
1. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
2. Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes
3. A high-performance multi-beam microaccelerometer for vibration monitoring in intelligent manufacturing equipment
4. Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer
5. Piezoelectric MEMS sensors: state-of-the-art and perspectives
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