A Silicon Platform With MEMS Active Alignment Function and Its Potential Application in Si-Photonics Packaging-Reference-Cited by-同舟云学术

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A Silicon Platform With MEMS Active Alignment Function and Its Potential Application in Si-Photonics Packaging

Published:2010-01 Issue:1 Volume:16 Page:267-275
ISSN:1077-260X
Container-title:IEEE Journal of Selected Topics in Quantum Electronics
language:
Short-container-title:IEEE J. Select. Topics Quantum Electron.

Author:

Qing Xin Zhang ,Yu Du ,Chee Wei Tan ,Jing Zhang ,Ming Bin Yu ,Wooi Gan Yeoh ,Guo-Qiang Lo ,Dim-Lee Kwong

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics

Link

http://xplorestaging.ieee.org/ielx5/2944/5406274/05353705.pdf?arnumber=5353705

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment;Journal of Microelectromechanical Systems;2024-04

2. Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors;Journal of Microelectromechanical Systems;2024-02

3. Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits;Optics Express;2023-09-01

4. Critical analysis of in-plane free-space light beam coupling using photonic curved micromirrors;Journal of Optical Microsystems;2022-07-09

5. Silicon photonic microelectromechanical switch using lateral adiabatic waveguide couplers;Optics Express;2018-12-12

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