Destructive Reliability Analysis of Electromagnetic MEMS Micromirror Under Vibration Environment

Author:

Fang Xiao-Yong,Li Xiu-Yuan,Hu Kai-Ming,Yan Ge,Wu Jia-Hao,Zhang Wen-MingORCID

Funder

National Science Fund for Distinguished Young Scholars

Program of Shanghai Academic/Technology Research Leader

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Magnetic field density concentrated permanent magnet structure for electromagnetic MEMS scanning mirror;Sensors and Actuators A: Physical;2024-08

2. Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror;International Journal of Optomechatronics;2024-05-22

3. Application of vibration analysis for medical diagnosis;Progress in Medical Devices;2024-03-31

4. Piezoelectric MEMS fast steering mirror with high reliability for free-space laser communication;Free-Space Laser Communications XXXVI;2024-03-12

5. Research and Optimization of Large Aperture Electromagnetic Mems Mircomirror for Automotive Lidar;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

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