Magnetic field density concentrated permanent magnet structure for electromagnetic MEMS scanning mirror

Author:

Liu Songtao,Zhang Gaofei,Meng Lingzhuo,Geng Shiqi,You Zheng

Publisher

Elsevier BV

Reference32 articles.

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3. Chen, M., Yu, H., Guo, S., Xu, R., & Shen, W. An Electromagnetically-driven MEMS Micromirror for Laser Projection. Proceedings of the 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015) (2015).

4. Yu, H., Zhou, P. & Shen, W. Fast-scan MOEMS Mirror for HD Laser Projection Applications. in 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 265-269 (2021).

5. Slow scanning electromagnetic scanner for laser;Jeong;J. Micro/Nanolith. MEMS MOEMS,2008

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