Effect of variation of design parameters on displacement and driving voltage of comb-drive actuators-Reference-Cited by-同舟云学术

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Effect of variation of design parameters on displacement and driving voltage of comb-drive actuators

Published:2014-04 Issue: Volume: Page:
ISSN:
Container-title:International Conference for Convergence for Technology-2014
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Author:

Priyadarshini Alankrita,Mahapatra Rajat

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/7078819/7092013/07092328.pdf?arnumber=7092328

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors;Journal of Micromechanics and Microengineering;2023-12-28

2. Parametric Analysis of Electrostatic Comb Drive for Resonant Sensors Operating under Atmospheric Pressure;Journal of Sensors;2023-09-30

3. Design and Analysis of Micro Actuator through Trapezoidal Shaped Electrostatic Comb Drive and Curved Beam System;2022 5th International Conference on Advanced Systems and Emergent Technologies (IC_ASET);2022-03-22

4. Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously;Journal of Micromechanics and Microengineering;2021-11-26

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