Design and Analysis of Micro Actuator through Trapezoidal Shaped Electrostatic Comb Drive and Curved Beam System-Reference-Cited by-同舟云学术

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Design and Analysis of Micro Actuator through Trapezoidal Shaped Electrostatic Comb Drive and Curved Beam System

Published:2022-03-22 Issue: Volume: Page:
ISSN:
Container-title:2022 5th International Conference on Advanced Systems and Emergent Technologies (IC_ASET)
language:
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Author:

Nawaz Faisal¹,Jamil Umar²,Aziz Muhammad Shahbaz³,Shakoor Rana Iqtidar⁴

Affiliation:

1. Ajou University,Department of Electrical & Computer Engineering,Suwon,South Korea

2. The University of Texas at San Antonio,Department of Electrical & Computer Engineering,San Antonio,United States of America

3. Air University,Department of Electrical & Computer Engineering,Islamabad,Pakistan

4. National Centre of Robotics & Automation,MEMS Sensor Design & Test Lab,Islamabad,Pakistan

Funder

NCR

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9765836/9765827/09765902.pdf?arnumber=9765902

Reference16 articles.

1. Electrostatic comb-drive actuator for MEMS relays/switches with double-tilt comb fingers and tilted parallelogram beams

2. Effect of variation of design parameters on displacement and driving voltage of comb-drive actuators

3. A New Analysis on Reduction of Undesired Beam Bending in Electrostatic Comb Drive MEMS Actuator

4. A Novel MEMS Tunable Comb Resonator With Non-Uniform Varied Finger Lengths

5. Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Parametric Analysis of Electrostatic Comb Drive for Resonant Sensors Operating under Atmospheric Pressure;Journal of Sensors;2023-09-30

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