Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor for high-density embedded memory
Author:
Affiliation:
1. Univ. Grenoble Alpes,CEA-Leti,Grenoble,France,F-38000
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10268496/10268469/10268513.pdf?arnumber=10268513
Reference10 articles.
1. Improvement of HfO2 based RRAM array performances by local Si implantation
2. Four-layer 3D vertical RRAM integrated with FinFET as a versatile computing unit for brain-inspired cognitive information processing
3. Fabrication of Low-Power RRAM for Stateful Hyperdimensional Computing
4. Non-volatile memory behavior of interfacial InOx layer in InAs nano-wire field-effect transistor for neuromorphic application
5. A 4F2 Vertical Gate-all-around Nanowire Compute-in-memory Device Integrated in (1T1R) Cross-Point Arrays on Silicon
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