New Spectrum Imaging Method for Solid Surfaces with Secondary Electrons acquired over Wide Energy Range (>1000 eV)-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

New Spectrum Imaging Method for Solid Surfaces with Secondary Electrons acquired over Wide Energy Range (>1000 eV)

Published:2023-07-24 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
language:
Short-container-title:

Author:

Uchida Tatsuya¹,Ikita Konomi¹,Tanaka Akihiro¹,Tsutsumi Kenichi¹,Ikeo Nobuyuki¹,Yokouchi Kazushiro¹,Taguchi Noboru²,Tanaka Shingo²

Affiliation:

1. JEOL Ltd.,SA Business Unit,SA Research and Development Department,Akishima, Tokyo,Japan,196-8558

2. Research Institute of Electrochemical Energy,Department of Energy and Environment National Institute of Advanced Industrial Science and Technology (AIST),Ikeda, Osaka,Japan,563-8577

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10248978/10248979/10249080.pdf?arnumber=10249080

Reference6 articles.

1. Quantitative Chemical State Analysis of Tin Oxides (Sn, SnO, and SnO2) with High-Energy Resolution AES

2. Three-dimensional AES of segregated materials on a gold pad

3. Graphene Imaging Using REELS Spectra by Auger Electron Spectroscopy

4. Li analysis by REELS measurement using scanning AES apparatus;Taguchi;ECASIA,2019

5. Spectrum imaging measurements with semi-parallel detection using an AES apparatus

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP