Novel Nano-probing Technique for Column Short Failure in Flash Memory Devices

Author:

Yeoh Lai-Seng1,Chong Kok-Cheng1,Li Susan2

Affiliation:

1. Infineon Technologies Memory Solutions Malaysia Sdn. Bhd.,Penang,Malaysia,11900

2. Infineon Technologies Inc.,San Jose,California,USA,95134

Publisher

IEEE

Reference10 articles.

1. Combining Current Imaging, EBIC/EBAC, and Electrical Probing for fast and reliable in situ Electrical Fault Isolation;kleindiek;Proc IEEE Int Symp Physical and Failure Analysis Integrated Circuits (IPFA),2016

2. Low-voltage EBIC investigation of fails

3. Advances in Electron-Beam-Induced-Current Analysis of Integrated Circuits;schick;Scanning Electron Microscopy,0

4. Nano-probing (Failure Analysis);kleindiek;Technical Notes Kleindiek Nanotechnik,0

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