Author:
Rummel Andreas,Johnson Greg M.,Kemmler Matthias,Rodgers Thomas
Cited by
3 articles.
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1. In-situ EBIC measurements of IGBT during device turn-on;2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA);2023-07-24
2. Novel Nano-probing Technique for Column Short Failure in Flash Memory Devices;2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA);2023-07-24
3. Conductive AFM in SEM for 7 nm and beyond : AM: Advanced Metrology;2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2022-05-02