Author:
Takei R.,Makimoto N.,Tabaru T.,Akiyama M.,Itoh T.,Kobayashi T.
Cited by
3 articles.
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1. Piezoelectric Tantalum Aluminum Nitride Grown on Stainless Steel for Low-Frequency Vibration-Driven Energy Harvesters;2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2022-12-12
2. Sub-6dB Aluminum Scandium Nitride Acoustic Delay Lines;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10
3. Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay Lines;IEEE Electron Device Letters;2022-04