Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay Lines
Author:
Affiliation:
1. School of Information Science and Technology, ShanghaiTech University, Shanghai, China
2. EVATEC AG, Trübbach, Switzerland
Funder
National Natural Science Foundation of China
Natural Science Foundation of Shanghai
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/55/9741089/09717253.pdf?arnumber=9717253
Reference33 articles.
1. Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study
2. Self-Heating and Quality Factor: Thermal Challenges in Aluminum Scandium Nitride Bulk Acoustic Wave Resonators
3. First-principles calculation of electroacoustic properties of wurtzite (Al,Sc)N
4. Overview of design challenges for single phase unidirectional SAW filters
5. Over 12% of Coupling Coefficient Demonstrated by 3GHz Sc0.12Al0.88N Based Laterally Coupled Alternating Thickness (LCAT) Mode Resonators
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3. Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (112¯0)$\left(\right. 11 \overset{\cdot}{2} 0 \left.\right)$ Al0.56Sc0.44N Films;physica status solidi (RRL) – Rapid Research Letters;2024-02-27
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5. Lamé-Mode Resonator with Trapezoidal Grooves Based on Sc0.3Al0.7 N/AlN Composite Film Achieving Coupling Coefficient of 18.7%;2023 8th International Conference on Integrated Circuits and Microsystems (ICICM);2023-10-20
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