Author:
Doherty J.,Ward B.,Kellogg E.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,General Engineering,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Focused ion beam technology and applications;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1987-03
2. Potential applications of focused ion beam technology for the semiconductor industry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-05
3. Lithographie par faisceaux d'ions : simulations et résultats expérimentaux;Revue de Physique Appliquée;1985
4. Liquid metal ion sources for FIB microfabrication systems — recent advances;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-01