Liquid metal ion sources for FIB microfabrication systems — recent advances-Reference-Cited by-同舟云学术

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Liquid metal ion sources for FIB microfabrication systems — recent advances

Published:1985-01 Issue:1-2 Volume:6 Page:135-142
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Prewett P.D.,Kellogg E.M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference27 articles.

1. High‐resolution, ion‐beam processes for microstructure fabrication

2. A 100‐kV ion probe microfabrication system with a tetrode gun

3. 400‐Å high aspect‐ratio lines produced in poylmethyl methacrylate (PMMA) by ion‐beam exposure

4. Proc. SIMS IV;Rudenauer,1983

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