Improvement of RTS Noise and Peel Off Issue of BSI CIS Products by Changing FEP Film Stack Raw Material
Author:
Affiliation:
1. SK Hynix System IC,Korea
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10102927/10102928/10102943.pdf?arnumber=10102943
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1. Negative charge trapping effects in A12O3 films grown by atomic layer deposition onto thermally oxidized 4H -SiC;zhang;J Appl Phys,2013
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3. Investigation of interface characteristics of Al2O3/Si under various O2 plasma exposure times during the deposition of Al2O3 by PA-ALD
4. A study on Flicker Noise Improvement by Decoupled Plasma Nitridation
5. Random Telegraph Signal in CMOS Image Sensor Pixels
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