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Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication

  • Published:2013-06 Issue:3 Volume:22 Page:613-624
  • ISSN:1057-7157
  • Container-title:Journal of Microelectromechanical Systems
  • language:
  • Short-container-title:J. Microelectromech. Syst.

Author:

Gennat Marc1,Meinig Marco2,Shaporin Alexey3,Kurth Steffen2,Rembe Christian4,Tibken Bernd5

Affiliation:

1. Rheinkalk GmbH, Wülfrath, Germany

2. Fraunhofer Institute for Electronic Nano Systems, Chemnitz, Germany

3. Department of Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany

4. Research & Development, Polytec GmbH, Waldbronn, Germany

5. Department of Automatic Control, University of Wuppertal, Wuppertal, Germany

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering
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