Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch-Reference-Cited by-同舟云学术

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Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch

Published:2004-06 Issue:3 Volume:13 Page:421-428
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:en
Short-container-title:J. Microelectromech. Syst.

Author:

Oberhammer J.,Stemme G.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/28958/01303620.pdf?arnumber=1303620

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Response Analysis of Nonlinear Free Vibration of Parallel-Plate MEMS Actuators: An Analytical Approximate Method;Journal of Vibration Engineering & Technologies;2020-03-12

2. Novel concept of a low-power high-volume microfluidic actuator: theory of operation and experimental characterization;Sensors and Actuators A: Physical;2019-06

3. Low-voltage micromechanical RF switch based on a piezoelectric micro-cantilever integrated with a transmission line;Journal of the Korean Physical Society;2015-12

4. A Highly Reliable Two-Axis MEMS Relay Demonstrating a Novel Contact Refresh Method;Journal of Microelectromechanical Systems;2015-10

5. Novel electro-thermal latching micro-switch based on Ni/electrophoretic polymer micro-cantilevers;Journal of Micromechanics and Microengineering;2014-11-19

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