Response Analysis of Nonlinear Free Vibration of Parallel-Plate MEMS Actuators: An Analytical Approximate Method-Reference-Cited by-同舟云学术

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Response Analysis of Nonlinear Free Vibration of Parallel-Plate MEMS Actuators: An Analytical Approximate Method

Published:2020-03-12 Issue:6 Volume:8 Page:935-946
ISSN:2523-3920
Container-title:Journal of Vibration Engineering & Technologies
language:en
Short-container-title:J. Vib. Eng. Technol.

Author:

Yu Yongping,Chen Lihui,Wang Zhigang,Liu Guoji

Funder

National Natural Science Foundation of China

Jilin Provincial Department of Education

Guangzhou Marine Geological Survey

Publisher

Springer Science and Business Media LLC

Link

http://link.springer.com/content/pdf/10.1007/s42417-020-00204-7.pdf

Reference39 articles.

1. Zhang W, Yan H, Peng Z, Meng G (2014) Electrostatic pull-in instability in MEMS/NEMS: a review. Sens Actuators A 214:187–218. https://doi.org/10.1016/j.sna.2014.04.025

2. Chuang W-C, Lee H-L, Chang P-Z, Hu Y-C (2010) Review on the modeling of electrostatic MEMS. Sensors 10:6149–6171. https://doi.org/10.3390/s100606149

3. Lee KB (2007) Closed-form expressions for pull-in parameters of two-degree-of-freedom torsional microactuators. J Micromech Microeng 17:1853–1862. https://doi.org/10.1088/0960-1317/17/9/014

4. Jaibir S, Nagendra K, Amitava D (2012) Fabrication of low pull-in voltage RF MEMS switches on glass substrate in recessed CPW configuration for V-band application. J Micromech Microeng 22:025001. https://doi.org/10.1088/0960-1317/22/2/025001

5. Pescini L, Lorenz H, Blick RH (2003) Mechanical gating of coupled nanoelectromechanical resonators operating at radio frequency. Appl Phys Lett 82:352–354. https://doi.org/10.1063/1.1536032

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1. Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates;IEEE Access;2023

2. Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field;Electronics;2022-09-22

3. Investigation of Static and Dynamic Characteristics of an Electrostatically Actuated Rectangular Microplate with Axial Internal Stress and Transverse Pressure;Journal of Vibration Engineering & Technologies;2022-07-12

4. Pull-In Dynamics of Two MEMS Parallel-Plate Structures for Acceleration Measurement;IEEE Sensors Journal;2021-08-15

5. Chaotic Dynamics of MEMS Resonators Under Multi-coupled Fields;Journal of Vibration Engineering & Technologies;2021-07-16

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