Electrostatic correction of structural imperfections present in a microring gyroscope-Reference-Cited by-同舟云学术

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Electrostatic correction of structural imperfections present in a microring gyroscope

Published:2005-04 Issue:2 Volume:14 Page:221-234
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Gallacher B.J.,Hedley J.,Burdess J.S.,Harris A.J.,Rickard A.,King D.O.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/30661/01416899.pdf?arnumber=1416899

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