Fracture Properties of Silicon Carbide Thin Films by Bulge Test of Long Rectangular Membrane-Reference-Cited by-同舟云学术

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Fracture Properties of Silicon Carbide Thin Films by Bulge Test of Long Rectangular Membrane

Published:2008-04 Issue:2 Volume:17 Page:453-461
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Zhou Wei,Yang Jinling,Sun Guosheng,Liu Xingfang,Yang Fuhua,Li Jinmin

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/4481154/04481166.pdf?arnumber=4481166

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