Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device-Reference-Cited by-同舟云学术

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Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device

Published:2011-08 Issue:4 Volume:20 Page:959-967
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Zhang Yong,Liu Xinyu,Ru Changhai,Zhang Yan Liang,Dong Lixin,Sun Yu

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/5968128/05871668.pdf?arnumber=5871668

Cited by 75 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Silicon nanowire piezoresistor and its applications: a review;Nanotechnology;2024-06-20

2. Real-Time Quantitative Electromechanical Characterization of Nanomaterials Based on Integrated MEMS Device;IEEE Sensors Journal;2023-10-01

3. An Integrated Mems Device for in-Situ Four-Probe Electro-Mechanical Characterization of PT Nanobeam;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

4. MEMS Platforms for in-situ Testing of Mechanical Properties of Nanostructures;Comprehensive Structural Integrity;2023

5. Mechanical Properties of Nanowires;Encyclopedia of Nanomaterials;2023

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